A Study on Ceramic Heater Devices Based on Si3N4 with a MoO3 Protective Layer

Currently, the need for high performance heaters industrial application is increasing, and repeated wear, rapid temperature change, uneven can cause deteriorating quality reduced productivity. The ceramic heater in this study consists of a substrate, an electrode layer, protective low-melting glass frit was used all layers to allow low-temperature processing. As substrate heater, Si3N4, which twice as strong AlN has excellent wear resistance, used. material, Ag-Pd, provides good adhesion Si3N4 electrical conductivity used, MoO3 powder mixed 8 : 2 make paste. adjusts resistance Ag-Pd electrode, thereby supplementing performance. were film layer that protects added unify materials between layers.